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| A Construction of Laser Interferometer of Nanometer Displacement Calibration System Based on HSPMI and Its Experiment Research |
| LI Qing-xian1,GAO Si-tian2,LI Wei2,SHI Yu-shu2,LU Ming-zhen2,CHEN Ben-yong1 |
1.Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310018, China;
2.National Institute of Metrology, Beijing 100013,China |
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Abstract A laser interferometer of nanometer displacement calibration system has been constructed based on high stability plane mirror interferometer (HSPMI).The layout of the calibration system is described.The data acquisition software based on VME bus has been designed for digital signal processing.Errors of the calibration system have been analyzed and the measurement accuracy is 293 nm.The results of the stability test and the nanometer displacement measurement of the calibration system demonstrate that the calibration system is effective and practical
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2013, Vol. 34 
