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| Reliability Evaluation of Gas Dynamic Dilution Device |
| WU Yu-tong1,BI Zhe1,YANG Yang-zhongfu2,MA Hao-miao1,WU Hai1,3 |
1. National Institute of Metrology,Beijing 100029,China
2. Chinese Society for Measurement,Beijing 100029,China
3. Zhengzhou Institute of Metrology, Zhengzhou, Henan 450001,China |
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Abstract A dilution device was built based on mass flow controllers (MFC), and a high-precision CH4 spectrometer was used to evaluate the reliability of the gas dilution device. Experimental results showed that when the dilution ratio was 0.01～0.02, the relative error of the theoretical concentration of gas mixture produced by the device was not more than ±4%, and when the dilution ratio was 0.04～0.1, the relative error was within±0.5%. The accuracy of the dilution device was not so good when the dilution ratio was very small. The change of input gas pressure upstream of MFC had influence on its output gas flow. When the input pressure changed in the range of 0.2 ~ 0.6MPa, the variation range of MFC output gas flow was not more than 1%, resulting in the variation of standard gas concentration output by the dilution device was not more than 1%. When the input gas pressure changed in the range of (2～6)bar, the variation range of MFC output gas flow was not more than 1%. The input gas pressure variation could interfere with the diluted gas concentration generated by the dilution device, of which the influence was less than 1%. When using the dilution device to prepare standard gas, it is preferable to set the MFC in the range above 10% of its full scale, so as to ensure the reliability of the dilution device.
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Received: 01 December 2020
Published: 15 July 2021
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2021, Vol. 42 
