2500Pa基准微压计性能优化与研究

doi:10.3969/j.issn.1000-1158.2020.Z1.21

Abstract
Figure/Table
References (16)
Related Citation (15)

Download: PDF (0 KB) HTML (1 KB)
Export: BibTeX | EndNote (RIS)

Abstract By analyzing and studying the performance of the 2500Pa micro-pressure reference after modification, the relationship between working medium temperature and the liquid level height of the container was summarized, the relationship was extracted, and the liquid level height/temperature coefficient at the pressure point 0 was obtained:a=0.030mm/℃; b=0.017mm/℃; Using the modified formula to optimize the water density value method, the accuracy of the water density value was improved by 0.0006% on average, and the errors in the density table of relevant regulations were corrected. The comparison experiment En<1, Obtain satisfactory results. Through the above optimization, the performance of the micro-pressure benchmark can be improved to meet the demand of traceability and transmission of pressure value in the development of the times.

Key words： metrology benchmark density liquid level height uncertainty

PACS:

TB935

	Service

	E-mail this article
	Add to my bookshelf
	Add to citation manager
	E-mail Alert
	RSS
	Articles by authors
	MA Ke
	YANG Yuan-chao
	WANG Peng

Cite this article:

MA Ke,YANG Yuan-chao,WANG Peng. Improvement of the 2500Pa Reference Micromanometer[J]. Acta Metrologica Sinica, 2020, 41(12A): 110-115.

URL:

http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.Z1.21 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I12A/110

［1］Jager J. Use of a precision mercury manometer with capacitance sensing of the memsci［J］. Metrologia, 1993, 94, 30: 553-558.
［2］李燕华, 王金库. 基于超声测长技术和激光干涉技术的0～2500Pa压力基准装置设［J］. 计测技术, 2012, 32(6)41-45.
Li Y H, Wang J K. A Design of 0~2500Pa primary pressure standard based on ultrasound and laser interferometry［J］. Metrology & Measurement Technology, 2012, 32 (6): 41-45.
［3］Li Y H. New low-range pressure standard at NIM, China［C］//Proceeding of IPSV’2003 international symposium on pressure and vacuum. Beijing, 2003: 36-40.
［4］Li Y H, Yu H Y, Wang J K. Development of vacuum metrology in National institute of metrology［C］//Abstracts of the 18th International of Vacuum Congress. Beijing, 2010: 903-907.
［5］梁军汀, 朱士明, 卢杰. 高精度超声波微压差计［J］. 声学技术, 1998(4): 173-176.
Liang J T, Zhu S M, Lu J. High accuracy ultrasonic pressure difference meter［J］. Technical Acoustics, 1998(4): 173-176.
［6］Li Y H, Yang Y C, Wang J K, et al. A new primary standard oil manometer for absolute pressure up to 10kPa［J］. Metrologia, 2015, 52: 111-120.
［7］Heydemann P L M, Tilford C R, Hyland R W. Ultrasonic manometers for low and medium vacua under development at the National Bureau of Standards［J］. J Vac Sci Technol, 1977, 14: 597-605.
［8］Miiller A P, Tilford C R, Hendricks J H. A low differential-pressure primary standard for the range 1 Pa to 13kPa［J］. Metrologia, 2005, 42: S187-S192.
［9］Sharma D R, Vijayakumar D A. Re-evaluation of measurement uncertainty of ultrasonic interferometer manometer, a primary pressure standard established at NPL［J］. MAPAN-Journal of Metrology Society of India, 2006, 21: 37-46.
［10］JJG 158-2013 补偿式微压计检定规程［S］.
［11］NIST. Thermophysical Properties of Fluid Systems［DB/OL］. 2019.
［12］李燕华. 基准微压计及不确定度分析［C］// 2001全国压力计量测试技术年会论集, 北京, 2001.
［13］杨远超. 活塞压力计自动化校准方法研究［J］. 计量学报. 2017, 38(6): 708-12.
Yang Y C. Research on automated calibration method for piston gauges［J］. Acta Metrologica Sinica, 2017, 38 (6): 708-712.
［14］悦进, 杨远超, 王金库. FPG8601微压气体活塞式压力计的校准［J］. 计量技术. 2017, (10): 51-4.
［15］Yang Y C, Driver R G, Quintavalle J S, et al. An integrated and automated calibration system for pneumatic piston gauges［J］. Measurement, 2019, 134: 1-5.
［16］JJG 1086-2013 气体活塞式压力计检定规程［S］.