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| The Application of MSA in Roughness Measurement |
| HUANG Cai-qing,LUO Jin-gang |
| Shenzhen STS Microelectronics Co. Ltd., Shenzhen, Guangdong 518038, China |
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Abstract In order to apply measurement system analysis to actual work correctly and reasonably and to ensure the validity of measurement data, surface roughness is chosen as measurement parameter combing with actual products demand and the measurement system analysis in the practical application of roughness measurement and common pitfalls are comprehensively explained from discrimination, bias, linearity, stability, repeatability and reproducibility and several aspects. This method has important reference and guidance significance for the wide and correct application of measurement system analysis in other measurement fields.
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2020, Vol. 41 
