Analysis and Elimination of Half-wavelength Error in Homodyne Laser Interference Signal Processing System Based on CORDIC Algorithm
FAN Hong-wei1,DIAO Xiao-fei2,ZHANG Fu-min1,XUE Zi2,DONG Xin-yuan1,TIE Mi-mi3
1. School of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China
2. National Institute of Metrology, Beijing 100029, China
3. School of Instrumentation Science and Opto-electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China
Abstract In order to meet the nano-scale resolution and high-speed processing, a laser interference signal processing system based on CORDIC algorithm was designed. A gross error of half-wavelength in the signal processing system was founded during the research process. The characteristics and formation mechanism of the gross error were studied, and the research showed that the root cause of the half-wavelength error was the existence of a certain error interval in phase measurement, thus, near the zero-point of interferometric signal phase, the error interval caused the decimal phase to be in ［2π-,0+］, which was uncertain. While the decimal phase combining with integer phase, the half-wavelength error might occur. On the basis of in-depth research of the gross error, a CORDIC algorithm phase compensation technique based on the correction table was proposed to eliminate the influence of the half-wavelength error on the laser interferometry system. The experimental results showed that the phase compensation technique could effectively eliminate the half-wavelength gross error in the signal processing system, and the total quantization error introduced by the CORDIC algorithm was less than ±0.05nm.
FAN Hong-wei,DIAO Xiao-fei,ZHANG Fu-min, et al. Analysis and Elimination of Half-wavelength Error in Homodyne Laser Interference Signal Processing System Based on CORDIC Algorithm[J]. Acta Metrologica Sinica, 2021, 42(3): 287-293.
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2021, Vol. 42 
