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| Measurement of Micro Transverse Spacing Using Single Frequency-stabilized Laser |
| LIU Yu-zhang1,GAO Hong-tang1,2,CHENG Yin-bao1,WANG Zhong-yu1 |
1. School of Instrumentation Science & Opto-Electronics Engineering, Beihang University, Beijing 100191, China
2. National Institute of Metrology, Beijing 100029, China |
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Abstract An interference system for the use of measuring micro transverse spacing is described. A highly frequency-stabilized laser of the wavelength of 532nm and a 633nm wavelength laser of relatively low level of wavelength uncertainty are brought into the system as optical sources. The charge coupled device(CCD) sensor is used in the system to get the interference graph. Some image processing methods are introduced to digitally enhance the interference image and calculate the fractional part of the interference fringe. The transverse distance is calculated by the method of exact fractions. By introducing some software technology to enhance the interference graph, a relatively high accuracy micro transverse spacing measurement can be realized with simple experimental condition.
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Received: 08 November 2019
Published: 18 February 2021
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2021, Vol. 42 
