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| Deposition and Characterization of Thin Films for Superconducting Transition Edge Sensor |
| LIU Xian-wen1,XU Xiao-long2,LI Jin-jin2,WANG Xue-shen2,ZHONG Qing2,CAO Wen-hui2,BAI Jian-nan1,ZHANG Shuo3,LIU Xiang-liang2,SI Kun-yu1,ZHOU Zhe-hai1,GAN Hai-yong2 |
1. School of Instrumentation Science and Opto Electronics Engineering, Beijing Information Science and Technology University, Beijing 100192, China
2. National Institute of Metrology, Beijing 100029, China
3.Shanghai Tech University, Shanghai 201210, China |
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Abstract Superconductivity transition edge sensors (TES) are single photon detectors which required for quantization of light intensity units, candela.The study of the physical properties of metal superconducting thin films is the basis of TES research. High purity Al and Ti superconducting nano films were prepared by magnetron sputtering with different power supplies. The growth rate of the films was analyzed as a function of pressure and power. The surface stress and electric properties of the films were measured by using surface stress meter and electrical measuring instrument.Finally, the films were tested inside a commercial dilution refrigerator to obtain its superconducting properties, especially the superconducting transition temperature Tc and the transition width ΔT which play an important role in TES energy resolution and time constant.The experimental results will lay the foundation for the fabrication of TES devices.
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Received: 17 May 2019
Published: 18 February 2021
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Corresponding Authors:
Xiao-Long XU
E-mail: xiaolong.xu@nim.ac.cn
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2021, Vol. 42 
