基于线激光传感器的工件尺寸测量系统的误差补偿方法

doi:10.3969/j.issn.1000-1158.2020.12.01

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Abstract An error compensation method based on line laser sensor is proposed for workpiece size measurement. In the method, coordinate system projection and image processing technology is used. The sensor coordinate system OM-XMYMZM and the equipment coordinate system O-XYZ are set, and the errors of the coordinate angles φ,δ,γ on the workpiece size coordinate values X,Y,Z are analyzed, and the φ,δ,γ are established based on error compensation model for projection angles α,β,θ on the XOY,YOZ,XOZ planes. The image processing techniques are used to measure α,β,θ, and the error-compensated workpiece size coordinate values X′,Y′,Z′ are calculated. The measurement experiment is carried out on 100mm×100mm×10mm workpieces, and the length, width, center distance, circle diameter, round line spacing and step height are measured. The measurement results show that the error of workpiece size measurement after error compensation is within 40μm. which is better than the 520μm before uncompensated; root mean square error is less than 40μm, better than 580μm before uncompensated. Among them, the center distance error compensation effect is the most significant, the measurement error is improved by 560μm; the round diameter error compensation effect is the least obvious, and the measurement error is only increased by 10μm.

Key words： metrology line laser sensor workpiece size measurement system error compensation coordinate system projection image processing technology

Received: 28 October 2019 Published: 08 December 2020

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TB921

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	Articles by authors
	ZHANG Xu
	CHEN Ai-jun
	SHEN Xiao-yan
	ZHANG Han-wen
	LI Dong-sheng
	LIU Yuan

Cite this article:

ZHANG Xu,CHEN Ai-jun,SHEN Xiao-yan, et al. Error Compensation Method for Workpiece Size Measurement System Based on Line Laser Sensor[J]. Acta Metrologica Sinica, 2020, 41(12): 1449-1455.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.12.01 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I12/1449

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