用于双探针原子力显微镜的定位平台的设计及实验验证

doi:10.3969/j.issn.1000-1158.2020.11.02

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Abstract A large-stroke positioning platform that provides precise displacement is designed for the needs of dual-probe atomic force microscopy. A flexible hinge and a piezoelectric actuator are respectively used as a guiding mechanism and a driving mechanism of the positioning platform. The X,Y,and Z axis motion directions are independently displaced by a parallel mechanism. Mathematical modeling of the positioning platform,analysis and calculation of the working stiffness and natural frequency of the positioning platform,and finite element simulation analysis. Mathematical modeling of the positioning platform is carried out, the working stiffness and natural frequency of the positioning platform are analyzed and calculated, and the finite element simulation analysis is carried out. The experimental devices of the positioning platform are constructed with the capacitive sensor as the displacement measuring unit,and the experimental verification is carried out. Experimental results show that the positioning platform has a travel distance of 110μm in the X and Y axis directions with a resolution of 5nm,and a travel distance of 45μm in the Z axis direction with a resolution of 5nm.

Key words： metrology double-probe atomic force microscope positioning platform;resolution;flexible hinge

Received: 23 October 2019 Published: 02 November 2020

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TB92

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	Articles by authors
	LIN Zhi-dong
	GAO Si-tian
	HUANG Lu
	LI Qi

Cite this article:

LIN Zhi-dong,GAO Si-tian,HUANG Lu, et al. Design and Experimental Verification of Positioning Platform for Double-probe Atomic Force Microscopy[J]. Acta Metrologica Sinica, 2020, 41(11): 1321-1326.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.11.02 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I11/1321

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