压头曲率半径对硬质薄膜结合力划痕测量影响的比较研究

doi:10.3969/j.issn.1000-1158.2020.09.09

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Abstract The film/base bonding force is an important characteristic parameter of the hard film materials. In the adhesion test of the hard film by the scratch method, there are many factors that affect the determination of the critical load Lc, such as the hardness & modulus of the film and the substrate, the surface roughness of the film, and so on. In addition, the test parameters including the instrument stiffness, the scratch rate, the radius of curvature of the indenter, etc., also affect the determination of the critical load Lc. The effects of three indenters with different radius of curvature (20μm, 50μm and 100μm) on the adhesion test of diamond-like carbon films with thickness of submicron were studied. Two differents substrate (i.e. single crystal silicon and 304 steel) were considered. The critical load of the two materials increases, as the increase of the radius of curvature of the tip.

Key words： metrology radius of curvature of indenter diamond-like carbon film film/base bonding force scratch method

Received: 11 January 2019 Published: 28 August 2020

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TB93

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	Articles by authors
	YU Jie
	TAO Xing-fu
	QIN Lin
	LI Xiao-bing

Cite this article:

YU Jie,TAO Xing-fu,QIN Lin, et al. Comparative Study on the Influence of Curvature Radius of Needle Tip on Scratch Test of Hard Film Bonding Force[J]. Acta Metrologica Sinica, 2020, 41(9): 1089-1094.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.09.09 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I9/1089

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