AFM轻敲模式下扫描参数对成像质量影响的研究

doi:10.3969/j.issn.1000-1158.2020.07.04

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Abstract The influence of scanning parameters on the atomic force microscopy(AFM) imaging quality is reviewed and analyzed. A novel amplitude error indicator that is employed to evaluate the AFM imaging quality is proposed. The coupling effect of scanning parameters on imaging quality is investigated with experiments. The result reveals the interaction effect between the three scanning parameters like scanning frequency(fs), integral gain(I), and amplitude set point(S), i.e. the larger I and fs can be set at low S, which implies that the optimal balance between imaging quality and measurement efficiency is achievable. The result also provides practical guidelines for the reasonable setting of scanning parameters in AFM imaging.

Key words： metrology AFM scanning parameters imaging quality tapping mode amplitude error

Received: 26 March 2019 Published: 29 June 2020

PACS:

TB92

Fund:Youth Foundation of Higher Institutions Natural Science of Hebei Province of China;Independent Research Program for Young Teachers of Yanshan University

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	Articles by authors
	CHEN Jian-chao
	AN Xiao-guang
	FENG Shi-xu
	WANG Jia-chun

Cite this article:

CHEN Jian-chao,AN Xiao-guang,FENG Shi-xu, et al. Research on the Influence of Scanning Parameters on Imaging Quality in AFM Tapping Mode[J]. Acta Metrologica Sinica, 2020, 41(7): 789-795.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2020.07.04 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2020/V41/I7/789

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