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| Error Analysis of Two-dimensional Grating Calibration System Based on Orthogonal Dual-axis Laser Interferometer |
| DONG Xin-yuan1, SUN Shuang-hua2, CUI Jing-yuan2, SHEN Xue-ping2, DUAN Fa-jie1, WANG Shu-hui1 |
1.College of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China
2.National Institute of Metrology, Beijing 100029, China |
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Abstract In order to improve the calibration accuracy of two-dimensional grating measurement system, a study was carried out to establish a national standard device of two-dimensional grating calibration. A two-dimensional grating calibration method based on dual-axis orthogonal laser interferometer was studied, and a two-dimensional grating calibration experimental device of coplanar motion structure was established. A automatic control calibration program based on C# was developed to realize automatic calibration. The influences of two-dimensional grating installation error on the calibration result were analyzed. A black box model of angular error correction was proposed, and the working plane based on MATLAB least squares fitting algorithm was utilized.
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Received: 31 October 2019
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2019, Vol. 40 
