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| Calibration and Comparison of a Spectral Confocal Sensor |
| YAN Yong-gang1, LIU Zhi-hao1, ZHU Xiao-ping2, DU Hua2, LI Jia-fu2 |
1.Henan Polytechnic University, Jiaozuo, Henan 454150, China
2.National Institute of Metrology, Beijing 100029, China |
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Abstract The error in the calibration of the spectral confocal sensor is mainly studied. The spectral confocal sensor was measured by a laser interferometer and a high-precision length measuring machine respectively, and the spherical probe was used to ensure that the optical path of the spectral confocal sensor was located at the center of the probe to ensure the accuracy of the spectral confocal sensor during measurement, and then replace the planar side head to calibrate the spectral confocal sensor. The measurement data was processed by the least squares method to obtain a nonlinear error of the measured data. The results showed that the nonlinear error of the high-precision length measuring machine is 0.030%, and the analytical linear error of the laser interferometer is 0.038%. The least squares method was used for data processing and nonlinear error calculation, which reduced the coaxiality error generated during calibration and the systematic error of the spectral confocal sensor, and improved the calibration accuracy of the spectral confocal sensor.
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Received: 09 October 2019
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2019, Vol. 40 
