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| The Effects of Different Setpoint to Measuring Accuracy and Service Life of a Probe on AFM |
| TANG Ying, CAO Cong, ZHANG Jian, ZHAO Dong-sheng |
| Shandong Institute of Metrology, Jinan, Shandong 250014, China |
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Abstract The effects of different setpoints on image quality, measuring accuracy, wear pattern of probe and sample in different testing mode were investigated. The results indicated that in contact mode, the larger the setting of the bending amount, the greater the interaction force between the probe and the sample, the noise was decreased, the image quality was increased, however it caused great wear to the sample and the probe, and reduce the measurement accuracy. Generally, the hard sample with large surface fluctuation is suitable for this mode. In tapping mode, the needle set an amplitude, from the value starts, as the amplitude decreased, the measurement accuracy and probe wear degree increased firstly and then decreased, and the noise and wear were not large, so the mode suit for non sticky samples with smooth surface. In the intelligent mode, the parameters were adjusted automatically, and the wear of the sample and probe was small, but the influence by the noise was great and the accuracy was low when the measurement data was small.
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Received: 30 September 2019
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2019, Vol. 40 
