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| A Calibration Method for Large-scale Imaging Probe Measuring Machines Based on Line Scale Stitching |
| WANG Bing-he, KANG Yan-hui, SUN Shuang-hua |
| National Institute of Metrology, Beijing 100029, China |
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Abstract In order to realize full range calibration of the large-scale imaging probe measuring machines scientifically, a method based on line scale stitchingwas developed. The method using the good repeatability of the imaging probe and the grating scale to get smaller stitching error through specific layout of the line scale. The length measurement error of the full range of XY measuring plane can be detected through this stitching method, which can ensure the accuracy of the whole measuring range. A demonstration for full range calibration of large-scale imaging probe measuring machine was provided, and the experiments and uncertainty analysis verified the feasibility of the method.
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Received: 20 September 2019
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2019, Vol. 40 
