Application of Laser Tracking Interferometer in Tests of Coordinate Measuring Machines
QIN Hai-meng1, LIN Hu2, XUE Zi2, YANG Guo-liang2, ZHANG Fu-min1
1.School of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China
2.National Institute of Metrology, Beijing 100029, China
Abstract Laser tracking interferometer has self-tracking function, it is more convenient when measuring the diagonal of space compared to laser interferometer.And so Laser tracking interometer is used to test coordinate measuring machines, the corresponding principle and method are proposed and analyzed.Base station coordinate self-calibration experiments were carried out for Laser tracking interometer with different distributions, and the base station coordinate was basically the same, and on this basis, the comparative experiments of Laser tracking interometer and laser interferometer were carried out.The experimental results show that the maximum deviation is 0.37μm when measuring length of 500mm, it decreases to 0.1μm after linear compensation.Therefore, the correctness and feasibility of the detection method of laser tracking interometer are verified, which provides a more convenient method for coordinate measuring machines tests, and this method is especially suitable for large-scale coordinate measuring machines tests, where the physical standards are restricted as the limited size.
2019, Vol. 40 
