激光跟踪干涉仪在坐标测量机检测中的应用

doi:10.3969/j.issn.1000-1158.2019.6A.001

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Abstract Laser tracking interferometer has self-tracking function, it is more convenient when measuring the diagonal of space compared to laser interferometer.And so Laser tracking interometer is used to test coordinate measuring machines, the corresponding principle and method are proposed and analyzed.Base station coordinate self-calibration experiments were carried out for Laser tracking interometer with different distributions, and the base station coordinate was basically the same, and on this basis, the comparative experiments of Laser tracking interometer and laser interferometer were carried out.The experimental results show that the maximum deviation is 0.37μm when measuring length of 500mm, it decreases to 0.1μm after linear compensation.Therefore, the correctness and feasibility of the detection method of laser tracking interometer are verified, which provides a more convenient method for coordinate measuring machines tests, and this method is especially suitable for large-scale coordinate measuring machines tests, where the physical standards are restricted as the limited size.

Key words： metrology error detection laser tracking interometer coordinate measuring machines least square method Gauss-Newton method

Received: 18 October 2019

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TB921

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	Articles by authors
	QIN Hai-meng
	LIN Hu
	XUE Zi
	YANG Guo-liang
	ZHANG Fu-min

Cite this article:

QIN Hai-meng,LIN Hu,XUE Zi, et al. Application of Laser Tracking Interferometer in Tests of Coordinate Measuring Machines[J]. Acta Metrologica Sinica, 2019, 40(6A): 1-7.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2019.6A.001 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2019/V40/I6A/1

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