超长导轨直线度对激光测长示值的影响

doi:10.3969/j.issn.1000-1158.2018.z1.09

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Abstract Applying space analytic geometry method to analyze the change of laser optical path length due to the change of the spatial position of the cube-corner retroreflector caused by the straightness of ultra-long guide rail theoretically, and establish the mathematical model. Then, using the actual measurement of rail straightness of Super-range laser universal measuring machine to analyze the effect of the straightness of guide rail on the indicating value of laser length measurement. Finally, it is concluded that the error of laser length measurement caused by the straightness of guide rail is less than 0.1μm in 26m according to Abbe's principle.

Key words： metrology laser measuring machine spatial analytic geometry cube-corner retroreflector straightness of guide rail Abbes principle

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TB92

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	Articles by authors
	YANG Wei-min
	YAN Hao
	YAN Jun-fang
	GAO Peng
	GUAN Zhe-min

Cite this article:

YANG Wei-min,YAN Hao,YAN Jun-fang, et al. Effect of the Straightness of Ultra-Long Guide Rail on Length Measurement Using Laser Interference Principle[J]. Acta Metrologica Sinica, 2018, 39(6A): 45-.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2018.z1.09 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2018/V39/I6A/45

［1］晏浩. 超大量程激光万能测长机的研制［R］. 太原:山西省计量科学研究院, 2016.
［2］王文生, 刘冬梅, 向阳, 等. 应用光学［M］. 武汉:华中科技大学出版社, 2010.
［3］李建双, 赵岩, 陶香琴, 等.“共光路”校准激光干涉仪的测长不确定度［J］. 计量学报, 2006, 27(3A):58-61.
Li J S, Zhao Y, Tao X Q, et al. A Way to Calibrate Laser Interferometer by Common Path［J］. Acat Metrologica Sinica, 2006, 27(3A):58-61.

［4］缪东晶, 李建双, 李连福, 等. 大长度激光测量中阿贝误差消除方法的研究［J］. 计量学报, 2015, 36(6):570-574.
Miu D J, Li J S, Li L F, et al. Research on Abbe Error Elimination Method for Large Length Laser Measurement［J］. Acat Metrologica Sinica, 2015, 36(6):570-574.
［5］Li J S, Zhang M S, He M Z, et al. Elimination of Abbe Error Method of Large-scale Laser Comparator［J］. Proceedings of SPIE-The International Society for Optical Engineering, 9446-94463.

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