主轴回转误差分析仪校准方法

doi:10.3969/j.issn.1000-1158.2018.z1.04

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Abstract In view of the difficult calibration of the spindle rotary error analyzer for ultra-precision machine tools, the system composition and measurement principle of the spindle rotary error analyzer were analyzed, and a calibration method based on indication error, linearity and repeatability was proposed. A special calibration device was built, the device uses nanometer micro-motion table to drive the displacement. Using high precision laser interferometer as measurement standard, the measuring line conforms to Abbe principle, it can be realized under normal experimental conditions. The optimal measuring ability is better than 10 nm in the displacement range of ±1 mm, and the stability of the indication value is better than 2 nm in 10 minutes. The calibration test of spindle rotation error analyzer was carried out, and the evaluation method of uncertainty was given. The calibration method and device can meet the requirements of spindle rotation error analyzer and various nanometer displacement sensors and instruments.

Key words： metrology spindle gyration error analyzer calibrating device calibration method uncertainty evaluation

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TB921

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	Articles by authors
	YUAN Xing-qi
	SHU Hong-lin
	CUI Jian-jun
	YAN Yong-gang
	MAO Bin
	CHEN Kai
	SHAO Hong-wei

Cite this article:

YUAN Xing-qi,SHU Hong-lin,CUI Jian-jun, et al. Calibration Method of Spindle Rotation Error Analyzer[J]. Acta Metrologica Sinica, 2018, 39(6A): 16-.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2018.z1.04 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2018/V39/I6A/16

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