平面绝对检测闭环自检实验研究

doi:10.3969/j.issn.1000-1158.2019.02.06

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Abstract Based on the Ai C and Wyant J C method of odd and even functions, a four-step rotary absolute test method is proposed to reduce the number of rotations and select the rotation angle of the second measurement as 90°. Experiment is based on HOOL L9600A-HS3 interferometer, using four-step rotation absolute measurement method, the three planes test with each other to calculate the absolute surface of the three planes, in which the plane C surface topography height root mean square (RMS) value and peak valley (PV) are 3.460 nm and 35.227 nm. After closed-loop self-test, measurement results are 3.783 nm and 34.305 nm,3.669 nm and 34.252 nm, it indicating that the measurement data can be closed-loop self-test. Using this method, the plane of National Institute of Metrology in China is measured. The RMS value and and the PV value of the plane are 2.400 nm and 19.600 nm, respectively, which are compared with the measurement results of 2.000 nm and 16.000 nm of National Institute of Metrology. The measurement deviation is on the order of nm, the measurement results fully proves the effectiveness of the experiment and high repeatability. In addition, the experiment also analyzes the influence of temperature on the measurement results.

Key words： metrology surface topography four-step rotary absolute test method closed-loop self-test repeatability

Received: 27 November 2017 Published: 07 March 2019

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TB96

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	Articles by authors
	ZHANG Ling-hua
	HAN Sen
	WU Quan-ying
	TANG Shou-hong
	LI Xue-yuan
	WANG Quan-zhao

Cite this article:

ZHANG Ling-hua,HAN Sen,WU Quan-ying, et al. Absolute Test of Optical Planar by Closed Loop[J]. Acta Metrologica Sinica, 2019, 40(2): 208-212.

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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2019.02.06 OR http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2019/V40/I2/208

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