Acta Metrologica Sinica  2018, Vol. 39 Issue (6): 771-776    DOI: 10.3969/j.issn.1000-1158.2018.06.04
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Experimental Research on the Control and Non-linear Calibration of Large-scale Two-dimensional Nanometer Displacement Stage
ZHOU Qi1,3,LIU Bing-feng2,LIAN Xiao-yi3,CHEN Ben-yong1,HUANG Lu3,LI Qi3,GAO Si-tian3
1. School of Mechanical Engineering and Automation, Zhejiang Sci-tech University, Hangzhou, Zhejiang 310018, China
2. School of Instrumentation Science and Opto-electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China
3. National Institute of Metrology, Beijing 100029, China
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Abstract  To study the control and non-linear correction of a large-scale two-dimensional nanometer displacement stage, a micro-displacement measurement system which based on the measurement principle of a laser interferometer was setted up.The composition of the dual-frequency laser interferometer measurement system was introduced, the control program of nanometer displacement stage and data acquisition program of laser interferometer were programmed. The non-linear calibration method was described, the polynomial third-order fitting and the third-order were compared through experiments. Experiments show that the calibration method using third-order piecewise fitting is better than third-order. Before calibration, the maximum nonlinearity error of x-axis and y-axis is 4.052 μm and 2.927 μm. After calibration, the maximum non-linearity of the x-axis is 15 nm and the maximum nonlinearity error of the y-axis is 17 nm, which is only 1% of the original nonlinearity error.
Key wordsmetrology      nano stages      non-linear calibration      laser interferometer     
Received: 24 April 2018      Published: 06 November 2018
PACS:  TB92  
Corresponding Authors: GAO Si-tian     E-mail: gaost@nim.ac.cn
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ZHOU Qi
LIU Bing-feng
LIAN Xiao-yi
CHEN Ben-yong
HUANG Lu
LI Qi
GAO Si-tian
Cite this article:   
ZHOU Qi,LIU Bing-feng,LIAN Xiao-yi, et al. Experimental Research on the Control and Non-linear Calibration of Large-scale Two-dimensional Nanometer Displacement Stage[J]. Acta Metrologica Sinica, 2018, 39(6): 771-776.
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http://jlxb.china-csm.org:81/Jwk_jlxb/EN/10.3969/j.issn.1000-1158.2018.06.04     OR     http://jlxb.china-csm.org:81/Jwk_jlxb/EN/Y2018/V39/I6/771
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