1. School of Mechanical Engineering and Automation, Zhejiang Sci-tech University, Hangzhou, Zhejiang 310018, China
2. School of Instrumentation Science and Opto-electronics Engineering, Beijing Information Science & Technology University, Beijing 100192, China
3. National Institute of Metrology, Beijing 100029, China
Abstract To study the control and non-linear correction of a large-scale two-dimensional nanometer displacement stage, a micro-displacement measurement system which based on the measurement principle of a laser interferometer was setted up.The composition of the dual-frequency laser interferometer measurement system was introduced, the control program of nanometer displacement stage and data acquisition program of laser interferometer were programmed. The non-linear calibration method was described, the polynomial third-order fitting and the third-order were compared through experiments. Experiments show that the calibration method using third-order piecewise fitting is better than third-order. Before calibration, the maximum nonlinearity error of x-axis and y-axis is 4.052 μm and 2.927 μm. After calibration, the maximum non-linearity of the x-axis is 15 nm and the maximum nonlinearity error of the y-axis is 17 nm, which is only 1% of the original nonlinearity error.
ZHOU Qi,LIU Bing-feng,LIAN Xiao-yi, et al. Experimental Research on the Control and Non-linear Calibration of Large-scale Two-dimensional Nanometer Displacement Stage[J]. Acta Metrologica Sinica, 2018, 39(6): 771-776.
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2018, Vol. 39 
