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| Research on Micro/nano Step Height Measurement System of Mirau Interference |
| GUO Xin1,SHI Yu-shu2,3,PI Lei2,ZHANG Shu2,LI Shi2,LI Dong-sheng1,GAO Si-tian2 |
1. College of Metrology & Measurement Engineering, China Jiliang University, Hangzhou, Zhejiang 310018, China
2. National Institute of Metrology, Beijing 100029, China
3. State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China |
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Abstract In order to realize the rapid measurement of the nanometer scale to the micro 3D step sample height, on the basis of ordinary optical microscope, a micro/nano step height measuring device is reconstructed. The whole hardware structure is designed. The measurement and control software and data processing software are programmed. Combined with Hilbert transform and wavelet transform, a new method of algorithm which is used for the reconstruction of 3D surface topography is proposed. The step samples of different height is used to test. The measurement results indicate that this system has high measurement accuracy and high repeatability, and its measurement range in vertical direction is not less than 50 μm.
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Received: 18 July 2016
Published: 28 February 2017
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Corresponding Authors:
SHI Yu-shu
E-mail: shiys@nim.ac.cn
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2017, Vol. 38 
