|
|
A Signal Processing Method for Frequencysweeping Interferometry |
WANG Xuan-ze1,2,ZHANG Shuai1,ZHAI Zhong-sheng1,2,YANG Lian-gen1,2,LIU Wen-chao1,2 |
1.School of Mechanical Engineering, Hubei University of Technology, Wuhan, Hubei 430068, China;
2.Key Lab of Modern Manufacture Quality Engineering, Wuhan, Hubei 430068, China |
|
|
Abstract A signal processing algorithm is designed for the absolute distance measurement system performed with frequency-sweeping interferometry. The system adopts frequency scanned method based on current modulation,and a comparing optical path and a measuring optical path are used to measure synchronously.The two interference signals are converted into electrical signals by two photodetectors and are used as input signals for absolute distance calculation.The principle of the measuring system and the characters of interference signals are presented,the difference smoothing convolution is used for processing the signals twice and the absolute distance is determined by the period or frequency information extracted from interference signals produced while scanning the laser frequency.The period calculating error of this algorithm is analyzed.The experiment results demonstrate that this method has major computing advantages.
|
|
|
|
|
[1]Perret L, Pfeiffer P. Sinusoidal nonlinearity in wavelength-sweeping interferometry[J]. Applied Optics,2007,46(33): 8074-8079.
[2]Swinkels B L, Bhattacharya N, Braat J J M. Correcting movement errors infrequency-sweeping interferometry[J]. Optics Letters, 2005, 30(17): 2242-2244.
[3]Yang H J, Deibel J, Nyberg S, et al. High-precision absolute distance andvibration measurement with frequency scanned interferometry[J]. Applied Optics,2005,44(19): 3937-3944.
[4]Pollinger F, Meiners-Hagen K, Wedde M, et al. Diode-laser-based high-precision absolute distance interferometer of 20 m range[J]. Applied Optics, 2009, 48(32): 6188-6194.
[5]Li Z L, Wang X Z, Bu P, et al. Sinusoidal phase-modulating laser diode interferometer insensitive to the intensity modulation of the light source[J]. Optik, 2009, 121(16): 799-803.
[6]Wang X F, Wang X Z, Liu Y M, et al. A sinusoidal phase-modulating fiber-optic interferometer insensitive to the intensity change of the light source[J]. Opt Laser Technol, 2003, 35(3): 219-222.
[7]Alzahrani K, Burton D, Lilley F, et al. Absolute distance measurement with micrometer accuracy using a Michelson interferometer and the iterative synthetic wavelength principle[J]. Optics Express,2012,20(5): 5658-5682.
[8]Sébastien Le Floch, Yves Salvadé, Rostand Mitouassiwou, et al. Radio frequency controlled synthetic wavelength sweep for absolute distance measurement by optical interferometry[J]. Applied Optics, 2008, 47(16): 3027-3031.
[9]Yang H J, Riles K. High-precision absolute distance measurement using dual-laser frequency scanned interferometry under realistic conditons[J]. Nucl Instrum Meth A, 2007, 575(3): 395-401.
[10]周浩,王选择,翟中生,等. 基于圆形四象限光电探测器的条纹形状识别方法研究[J]. 中国激光, 2012, 39(7): 0708002. |
|
|
|