Abstract：To meet the current needs of laser positioning calibration, white light interference scanning and welding machine head running in the fields of microelectronics manufacturing, it is urgent to develop new vertical running stages, large stroke and high precision vertical driving and control technology. The design and stable control of the stage are key factors in large stroke high-precision vertical motion. Therefore, a novel motion stage with a balancing mechanism is proposed to achieve large stroke nano stable motion in the vertical direction. The characteristics of the stage are that the N331 piezoelectric linear motor is independently driven, suspended through the air static guide rail, and the Z-axis balance system is designed to reduce the motor driving load. A stepping mode was used to realize the large travel actuation, and an analog mode was adopted to implement micro-displacement actuation. This strategy can be used to achieve fast and precise driving of 100 mm. In addition, the Z-stage can achieve compound control of the nanostepping and analog modes. The positioning fluctuation can be limited to ± 9 nm within the full range of 100 mm. According to the series of verification experiments, the stage can be suitable for driving and control tasks in coordinate measuring machines (CMMs), microlithography, and micromachining applications.
2024, Vol. 45 
