Evaluation of the Uncertainty for the Measurement of Surface Roughness by Low-noise Probing System
SHI Zhou-miao1,3,ZHANG Shu2,3,SHI Yu-shu2,PI Lei2,HU Jia-cheng1
1. China Jiliang University, Hangzhou, Zhejiang 310018, China
2.National Institute of Metrology,Beijing 100029, China
3. Shenzhen Institute Technology Innovation, NIM, Shenzhen, Guangdong 518132, China
Abstract：In order to improve the measurement capability of the existing stylus surface roughness measuring instrument, from the perspective of reducing the noise level of the instrument, a low noise stylus surface topography probing system has been developed.The probing system uses sample scanning, and uses a high precision capacitive sensor to measure the vertical movement of the stylus, thereby reflecting the true micro-nano topography of the measured surface, and achieves low noise level under nanometer-scale measurement.Ra is measured by the instrument standard sample and the uncertainty is evaluated.The results show that the uncertainty is 2.8 nm (k=2) for the Type C3 standard sample.
史舟淼,张树,施玉书,皮磊,胡佳成. 低噪声触针式表面粗糙度探测系统及测量不确定度分析[J]. 计量学报, 2022, 43(9): 1122-1127.
SHI Zhou-miao,ZHANG Shu,SHI Yu-shu,PI Lei,HU Jia-cheng. Evaluation of the Uncertainty for the Measurement of Surface Roughness by Low-noise Probing System. Acta Metrologica Sinica, 2022, 43(9): 1122-1127.
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2022, Vol. 43 
